The 2011.09 release of Sentaurus TCAD delivers a broad range of new
capabilities, from advanced structure generation and new models in
process and device simulation, to new methods for modeling semiconductor
device variability. In Sentaurus Process, we have worked with a leading
equipment vendor to improve plasma doping (PLAD) accuracy in our
implantation module, added 3D crystallographic deposition and a library
of complex shapes for easy creation of complex STI and raised SiGe
regions, and introduced a new method for generating structures with line
edge roughness (LER). In Sentaurus Device, we have introduced new
models for stress and orientation-dependent mobility in advanced logic
devices, polarization in III-Nitride devices and impact ionization for
SiC devices. To address the rising interest in device variability
analysis, we have developed an efficient technique based on the
impedance field method. We will also cover the application of Sentaurus
Interconnect to solder joint reliability analysis, and introduce a new
link between Sentaurus Interconnect and Raphael which enables RC
extraction in complex interconnect structures.

In this webinar we will present these and other enhancements and
illustrate their usage. The presentation will be followed by a Question
and Answer session where the attendees will have an opportunity to
interact with the presenter on the topics discussed.

Who should attend

Technology and process development engineers and managers, process integration engineers and TCAD engineers.


Karim El Sayed

Director, TCAD R&D


Karim El Sayed received his Dipl. Ing. and Ph.D. degree in physics
from the University of Frankfurt, Frankfurt, Germany, in 1990 and 1994,
respectively. From 1994 to 1995 he worked as a Post-Doctoral Fellow at
the Micro- and Nanotechnology Research Center of the Danish Technical
University, Lyngby, Denmark. From 1996 to 1998 he worked as a
Postdoctoral Fellow, in the Physics Department of the University of
Florida, Gainesville, before joining Synopsys Inc., Mountain View, CA
(formerly Integrated Systems Engineering, Inc., San Jose, CA). Dr. El
Sayed leads a team of TCAD application engineers focused on cutting-edge
application development.

Sudarshan Krishnamoorthy

TCAD Technical Marketing Manager