Calibre LFD is a lithography simulation tool that detects layout lithography weak points and analyzes the effect of lithography on the design’s electrical performance. It considers resolution enhancement techniques and other pattern transfer processes to determine the robustness of a given layout to manufacturing variations. This paper discusses the technical aspects of adopting Calibre LFD in the design flow, and presents the results and returns of three years of cooperation between Mentor Graphics and Infineon Technologies.

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