Filled with practical examples, this is a comprehensive reference on process reliability for semiconductor process and design engineers. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this practical, comprehensive guide.

Chapter 1 of Semiconductor Process Reliability in Practice, published by McGraw-Hill
ISBN: 9780071754279
Published: 2012