Root Cause Deconvolution (RCD) is the next step in scan test diagnosis resolution enhancement. It works by analyzing multiple layout-aware diagnosis reports together to identify the underlying defect distribution (root cause distribution) that is most likely to explain this set of diagnosis results. The results are then back-annotated to the individual diagnosis suspects. Where layout-aware diagnosis points to a segment, RCD can isolate a particular root cause in that segment. This increase in the FA relevance and success rate dramatically reduces the failure analysis (FA) cycle time from months to days.