Process Window OPC for Reduced Process Variability and Enhanced Yield
In this paper, a Process Window OPC (PWOPC) concept is discussed, along with its place in the design-to manufacturing flow. Use of additional models for process corners, integration of process fails and algorithm optimization for a production-worthy flow are described. Results are presented for 65nm metal levels.
Please disable any pop-up blockers for proper viewing of this Whitepaper.