Optimized Step Control Algorithm for a Salient-Pole Micromotor
This paper describes a control algorithm for optimizing the step response for the silicon micromachined electrostatic salient pole micromotor. The control algorithm is based on the solution of two variables: the critical and final times of the step response obtained from a second order differential equation of the micromotor model. The solution to the model equation was achieved by utilizing a combination of analytical and empirical methods. Both methods yield similar results.
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