OPC Recipe Optimization Using Simulated Annealing
One of the major problems in the RET flow is OPC recipe creation. The existence of numerous parameters to tune and the interdependence between them complicates the process of recipe optimization and makes it very tedious. There is usually no standard methodology to choose the initial values for the recipe settings or to determine stable regions of operation. In this context, simulated annealing is proposed to optimize OPC recipes. It will be shown how many parameters can be optimized simultaneously and how we can get insight about the stability of the recipe.
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