Modeling Laser Bandwidth for OPC Applications
This study demonstrates the correlation of physical laser bandwidth perturbations with perturbations of the optical model in Calibre. The laser bandwidth is experimentally perturbed to obtain several sets of CD measurements for different bandwidths. These are then used in model calibration with the corresponding perturbation in the optical model. Finally, we quantify the improvement in model accuracy obtained when including an input of laser bandwidth.
Please disable any pop-up blockers for proper viewing of this Whitepaper.