To overcome the limitation of table-driven retargeting, we developed model-based retarget. If we set the criteria of process window, OPC tool resizes the layout dimension automatically. OPC tool will do retarget-OPC-retarget iterations until process windows of all of designs become within the criteria. Without complicated table-driven retarget, we can apply bias to original layout during OPC process automatically. We have found that model-based retarget enables simplification of OPC process. Apart from the stereotype bias rule, model-based retargeting can cope with more complicated layout, considering overall layout environment. Therefore, retargeting becomes more effective and adequate, avoiding over/under retargeting.

Note: By clicking on the above link, this paper will be emailed to your TechOnline log-in address by Mentor Graphics.