Improving the CD Linearity and Proximity Performance of Photomasks Written on the Sigma7500-II DUV Laser Writer Through Embedded OPC

by Siemens EDA

Mentor Graphics Technical Library

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Siemens EDA

http://www.mentor.com

Siemens EDA (formerly Mentor Graphics) is a leader in electronic design automation software, providing both software and hardware design solutions. We enable companies to develop better electronic products faster and more cost-effectively. Our innovative products and solutions help engineers conquer design challenges in the increasingly complex worlds of board and chip design.,... Read More

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Improving the CD Linearity and Proximity Performance of Photomasks Written on the Sigma7500-II DUV Laser Writer Through Embedded OPC

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