Design Specific Variation in Pattern Transfer by Via/Contact Etch Process: Full-Chip Analysis

by Siemens EDA

Authored on: Apr 17, 2009

Mentor Graphics Technical Library

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Siemens EDA

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Siemens EDA (formerly Mentor Graphics) is a leader in electronic design automation software, providing both software and hardware design solutions. We enable companies to develop better electronic products faster and more cost-effectively. Our innovative products and solutions help engineers conquer design challenges in the increasingly complex worlds of board and chip design.,... Read More

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Design Specific Variation in Pattern Transfer by Via/Contact Etch Process: Full-Chip Analysis

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