As feature sizes shrink, the number of non-visual defects increases. At the same time, traditional methods for defect identification and yield learning are becoming less effective. Scan design has been the enabling technology for high quality manufacturing test for many years. Now with advanced diagnostics capabilities, a company’s investment in scan design can now be used for yield learning and yield monitoring. If properly leveraged, scan-based test and diagnostics can play an important role in yield learning and yield monitoring for nanometer design.

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