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New Features in TCAD Sentaurus: September 2011 Release

Original Air Date: Oct 6, 2011 | Duration: 45 min Webinar
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Overview:
The 2011.09 release of Sentaurus TCAD delivers a broad range of new capabilities, from advanced structure generation and new models in process and device simulation, to new methods for modeling semiconductor device variability. In Sentaurus Process, we have worked with a leading equipment vendor to improve plasma doping (PLAD) accuracy in our implantation module, added 3D crystallographic deposition and a library of complex shapes for easy creation of complex STI and raised SiGe regions, and introduced a new method for generating structures with line edge roughness (LER). In Sentaurus Device, we have introduced new models for stress and orientation-dependent mobility in advanced logic devices, polarization in III-Nitride devices and impact ionization for SiC devices. To address the rising interest in device variability analysis, we have developed an efficient technique based on the impedance field method. We will also cover the application of Sentaurus Interconnect to solder joint reliability analysis, and introduce a new link between Sentaurus Interconnect and Raphael which enables RC extraction in complex interconnect structures.

In this webinar we will present these and other enhancements and illustrate their usage. The presentation will be followed by a Question and Answer session where the attendees will have an opportunity to interact with the presenter on the topics discussed.

Who should attend
Technology and process development engineers and managers, process integration engineers and TCAD engineers.

Speakers:
Karim El Sayed

Director, TCAD R&D
Synopsys

Karim El Sayed received his Dipl. Ing. and Ph.D. degree in physics from the University of Frankfurt, Frankfurt, Germany, in 1990 and 1994, respectively. From 1994 to 1995 he worked as a Post-Doctoral Fellow at the Micro- and Nanotechnology Research Center of the Danish Technical University, Lyngby, Denmark. From 1996 to 1998 he worked as a Postdoctoral Fellow, in the Physics Department of the University of Florida, Gainesville, before joining Synopsys Inc., Mountain View, CA (formerly Integrated Systems Engineering, Inc., San Jose, CA). Dr. El Sayed leads a team of TCAD application engineers focused on cutting-edge application development.


Sudarshan Krishnamoorthy
TCAD Technical Marketing Manager
Synopsys

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