datasheets.com EBN.com EDN.com EETimes.com Embedded.com PlanetAnalog.com TechOnline.com  
Events
UBM Tech
UBM Tech
Welcome Guest Log In | Register

Using heated gas to control condensation in exhaust pipes

Authored on: Jan 2, 2013 by Fred Bouchard

Technical Paper

0 0
More InfoLess Info
Semiconductor and flat panel display manufacturing processes are gas based. Un-reacted reagents and by-products are pumped away to be scrubbed and exhausted. The final compression is performed by mechanical pumps. Exhaust gases are then passed through scrubbers and finally through fab-wide abatement systems. Proper operation and maintenance of exhaust gas handling systems is critical to successful high-tech manufacturing. This paper shows how to mitigate or eliminate condensation and clogging by diluting and heating exhaust gases. Solutions vary in their power requirements, dilution potential, and heating capability.
View
 
0 comments
write a comment

Please Login

You will be redirected to the login page

×

Please Login

You will be redirected to the login page

×

Please Login

You will be redirected to the login page