Using heated gas to control condensation in exhaust pipes

Semiconductor and flat panel display manufacturing processes are gas based. Un-reacted reagents and by-products are pumped away to be scrubbed and exhausted. The final compression is performed by mechanical pumps. Exhaust gases are then passed through scrubbers and finally through fab-wide abatement systems. Proper operation and maintenance of exhaust gas handling systems is critical to successful high-tech manufacturing. This paper shows how to mitigate or eliminate condensation and clogging by diluting and heating exhaust gases. Solutions vary in their power requirements, dilution potential, and heating capability.