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NF-Shuttle: Standardizing the fabless MEMS Industry

Authored on: Oct 1, 2012 by F. Assaderaghi et al

Technical Paper / Product Paper

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In order for the MEMS industry to replicate the success of the CMOS fabless model, there is a need for a similar standardized process technology. This will ultimately lead to the proliferation of disruptive MEMS-based solutions for a plethora of applications including motion sensing, navigation for location-based services, wireless communications, health and environmental sensing and many others. This paper describes the challenges for MEMS standardization and introduces the patented Nasiri-Fabrication (NF) Platform, a versatile process that can support multiple products, addresses all cost contributions, and is already deployed at the top 2 tier-1 CMOS foundries.
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