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C-V Measurement Tips, Tricks, and Traps

Authored on: Jan 24, 2011 by Lee Stauffer

Technical Paper

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Capacitance-voltage (C-V) testing has long been used to determine a variety of semiconductor parameters on many different devices and structures. Product and yield enhancement engineers use them in optimizing processes and device performance; reliability engineers employ them in qualifying material suppliers, monitoring process parameters, and analyzing failure mechanisms. This white paper offers an overview on selecting the most appropriate instrumentation for a particular application, as well as some of the C-V tests typically performed and their parameter extraction limits. It also includes techniques for connecting to a probe station and how to correct to the probe tips. Finally, it addresses identifying and correcting typical C-V errors.
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NIOS2 user Posted May 4, 2011

Nice article about the different ways to measure capacitance. Is there a typo on page 4, where using the 'ramp rate' technique using one volt / Sec ramps on 400 pF caps? should it be caps in the uF range?

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