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Controlling Tolerance and Determinism: Embedded Applications for an IO Device

Authored on: Apr 25, 2011 by Chris Ambrozic

Technical Paper

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Different equipment characteristics combine to determine the overall precision and accuracy of a given manufacturing tool. This paper focuses on those characteristics of equipment controllers that can be optimized for more precise and accurate process control. Specifically, there are certain characteristics that are exhibited by the control hierarchy and equipment configuration used in a wafer processing tool that are critical for meeting today's challenges of very small geometries and tight process tolerances. Two control characteristics that play defining roles in achieving the level of process control necessary for semiconductor device manufacture are the latency and determinism of the control process.
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prabhakar_deosthali Posted Apr 29, 2011

A good article explaining the tightrope situation in which today's control systems have to work. Apart from the right kind of RTOS which will minimize the interrupt latency, it is also important to keep any on-the-fly calculations or interpolations to the minimum while controlling a tool position or tool path.

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