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Linearity and Sensitivity Issues in Piezoresistive Pressure Sensors

Authored on: Mar 21, 2008 by Jaspreet Singh et al.

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This paper describes the various nonlinearities (NL) encountered in Si-based Piezoresistive pressure sensors. The effect of diaphragm thickness and position of the piezoresistors are analyzed, taking anisotropy into account. Also the effect of the oxide/nitride used for isolation between metal and diaphragm is studied from a linearity point of view.



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